1075

耐化学性与微波等离子工序 Resistance to chemicals with Microwave Etching and medium density CVD plasma process

NANOPURE ® 1075 Feature

NANOPURE®1075是作为通用低价位型开发的产品,具有优异的抗CF4、O2等离子侵蚀性能,且价格经济实惠。 适用于化学及微波蚀刻以及中等密度等离子 CVD 工序。

NANOPURE® #1075 which Popular and economy Version with combined CF4,O2 plasma resistance and Resistance to chemicals. *Application of semiconductor (Microwave etching plasma and medium density CVD processing)  

Typical Physical Propertise
Color White
Polymer Type Perfluoroelastomer
Specific Gravity 2.02
Hardness (Shore A) 78
Tensile Strength (Mpa) 18.0
Elongation (%) 160
Modulus 100% (Mpa) 12.0
Compression Set(%) 70hrs @ 200℃ 15
Service Temperature Range -20℃ to 250℃


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