9080A

NANOPURE®9080A全氟弹性体是为匹配高密度等离子化学沉积工序和NF3远程等离子系统开发的产品,具有优异的耐化学性和出色弹力恢复力,适用于合成驱动部位的密封圈。

NANOPURE® 9080A

9080A产品作为新型的全氟弹性体,在 300℃的高温下也能够持续使用。
*使用范围 :组合真空阀件、CVD VAT阀件检修

NANOPURE® 9080A perfluoroelastomer was developed specifically for high Density plasma CVD systems with RPS (Remote Plasma system).The chemical compatibility of this Compound is excellent and Low Compression set. 9080A is M&EE Co.,Ltd “ cleanest” Perfluoroelastomer to date ; it remains Stable at temperature as high as 300℃

Application area : Bonded slit valve and VAT valve repair
Typical Physical Propertise
Color White
Polymer Type Perfluoroelastomer
Specific Gravity 2.02
Hardness (Shore A) 75
Tensile Strength (Mpa) 15.0
Elongation (%) 220
Modulus 100% (Mpa) 8.2
Compression Set(%) 70hrs @ 200℃ 15
Service Temperature Range -20℃ to 300℃

Condition of Plasma Resistance Test

Contents Gas Flow (sccm) RF Power (W) Pressure(mT) Time (min) Temp. (℃)
NF3 200 1200 200 60 200
O2 200 1200 400 60 200
CF4 200 1200 200 60 200
SF6 200 1200 200 60 200

Weight Loss Ratio after Plasma Resistance Test



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