EAO75

VITON产品群中温度补偿性较高

For Semiconduct PECVD and HDPCVD Processes

NANOPURE® EAO-75是将现有氟橡胶( FKM)的耐热性和耐磨耗性大幅提高的产品。
NANOPURE® EAO-75是专为最大限度减少因机械性损伤造成蚀刻率低,导致微粒产生的一系列问题而设计。
此外,凭借优异的弹性恢复率(Excellent elastic recovery)与出色的机械特性,延长了密封件的使用寿命,为工序提供较高的投入产出比。 NANOPURE® EAO-75最高可在280℃环境下使用。

Features & Benefit

  • Excellent abrasion resistance
  • Minimal contamination due to seal degradation or metallic ion content
  • Extends in-use seal life between preventive maintenance cycles
  • Excellent physical properties
  • Low compression set

Suggested Applications

  • Endpoint windows
  • Valve seals
  • Fitting seals
  • Windows seals
  • Lid seals
  • Gas inlet seals
  • Slit valve seals
  • Chamber seals

Typical Physical Properties

Color Black
Polymer Type Perfluoroelastomer
Hardness1), Shore A 75
Tensile Strength at Break2), MPa 16.4
Elongation at Break3), % 155
100% Modulus4), MPa 9.1
Compression Set5), %
70 hours @ 204℃ 11
70 hours @ 250℃  
70 hours @ 300℃  
70 hours @ 325℃  
Maximum Continuous Service,
Temperature, ℃
280
  1. ASTM D1415 (ISO 48)
  2. ASTM D412 (ISO 37)
  3. ASTM D412 (ISO 37)
  4. ASTM D412 (ISO 37)
  5. ASTM D395 Method B ; (ISO 815)

推荐使用工序

化学蒸汽沉积(CVD) 及要求高度耐热的工序



COPYRIGHT(c) 2014 MNEE股份公司. All RIGHTS RESERVED

京畿道龙仁市器兴区塔室路58号路11 TEL 301-201-7000(总机) FAX 031-201-7070

관리자