EAO75S

VITON产品群中抗等离子侵蚀性能及耐磨耗性较高

For Semiconduct PECVD and HDPCVD Processes

NANOPURE ® EAO-75S是将现有氟橡胶(FKM)的耐磨耗性和耐化学性大幅提高的产品。
NANOPURE ® EAO-75S凭借非常出色的耐磨耗性,最大限度地减少了因机械性损伤造成的问题,延长了密封件的寿命,为工序提供较高的投入产出比。 此外,具有优异的弹性恢复率(Excellent elastic recovery),在低等离子环境下具有优异的抵抗性。
NANOPURE ® EAO-75S最高可在260℃环境下使用。

Features & Benefit

  • Excellent abrasion resistance
  • Minimal contamination due to seal degradation or metallic ion content
  • Extends in-use seal life between preventive maintenance cycles
  • Excellent physical properties
  • Low compression set

Suggested Applications

  • Endpoint windows
  • Valve seals
  • Fitting seals
  • Windows seals
  • Lid seals
  • Gas inlet seals
  • Slit valve seals
  • Chamber seals

Typical Physical Properties

Color Black
Polymer Type Perfluoroelastomer
Hardness1), Shore A 74
Tensile Strength at Break2), MPa 21.6
Elongation at Break3), % 230
100% Modulus4), MPa 5.4
Compression Set5), %
70 hours @ 204℃ 16
70 hours @ 250℃  
70 hours @ 300℃  
70 hours @ 325℃  
Maximum Continuous Service,
Temperature, ℃
260
  1. ASTM D1415 (ISO 48)
  2. ASTM D412 (ISO 37)
  3. ASTM D412 (ISO 37)
  4. ASTM D412 (ISO 37)
  5. ASTM D395 Method B ; (ISO 815)

推荐使用工序

SPUTTER 等驱动及需要抗摩擦的工序



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