9080A

NANOPURE®9080A Perfluoroelastomer is designed to correspond to NF3 Remote Plasma System and high-density plasma chemical vapor deposition process. NANOPURE®9080A is suitable for Sealing Compound at the Drive part due to its superb chemical resistance and Compression Restoration rate.

NANOPURE® 9080A

9080A, a new perfluoroelastomer, can be used continuously in high temperatures like 300°C.
*Application Division :Bonded Slit Valve, CVD VAT valve repair

NANOPURE® 9080A perfluoroelastomer was developed specifically for high Density plasma CVD systems with RPS (Remote Plasma system).The chemical compatibility of this Compound is excellent and Low Compression set. 9080A is M&EE Co.,Ltd “ cleanest” Perfluoroelastomer to date ; it remains Stable at temperature as high as 300℃

Application area : Bonded slit valve and VAT valve repair
Typical Physical Propertise
Color White
Polymer Type Perfluoroelastomer
Specific Gravity 2.02
Hardness (Shore A) 75
Tensile Strength (Mpa) 15.0
Elongation (%) 220
Modulus 100% (Mpa) 8.2
Compression Set(%) 70hrs @ 200℃ 15
Service Temperature Range -20℃ to 300℃

Condition of Plasma Resistance Test

Contents Gas Flow (sccm) RF Power (W) Pressure(mT) Time (min) Temp. (℃)
NF3 200 1200 200 60 200
O2 200 1200 400 60 200
CF4 200 1200 200 60 200
SF6 200 1200 200 60 200

Weight Loss Ratio after Plasma Resistance Test



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