Characteristics of NANOPURE products

Thermal property

Data taken from Solvay Solexis
  • Minimum 1.000hours operation expected.
  • Spectal compound reqored andtior interaner shorter term operation.

Chemical resistance

Fluld type Typical example Fluorine Content FFKM° 72.5% Perfluoroelastomer NANOPURE® product FKM° 66% fluorocarbon rubber product
Aliphatic hydrocarbon Propane Excellent Excellent
Aromatic hydrocarbons Benzence Excellent Excellent
Organic acids Acetic acid Excellent Fair-good
Inorganic acids Sulfuric acid Excellent Excellent
Alcohols Methanol Excellent Fair-excellent
Inorganic base Sodlum hydroxide Excellent Poor-fair
Organic base Aniline Excellent Fair
Ethers MTBE Excellent Fair-poor
Ketones Acetone Excellent Poor
Nitrous oxidizers Ammonium nitrate Excellent Good
Halogen oxidizers Chlorine Excellent Excellent
Heat transfer fluids Ethylene glycol Excellent Excellent
Oils & greases Mineral oil Excellent Excellent
Halogenated refrigerants HFC - 134a Fair-good Poor-fair
Polar solvents Water Excellent Excellent
Data taken from Solvay Solexis

Plasma characteristic

Plasma Resistance Test Conditions

  1. Picture before TestPicture before Test
  2. Picture after TestPicture after Test
  • Gas flow : 150 sccm
  • RF Power : 1100 W
  • Pressure : 400 mTorr
  • Temperature : 200℃
  • Test Time : 50 min
Contents Used Gas Gas Flow (sccm) RF Power (W) Pressure (mT) Time (min) Temp. (℃)
O2 O2 150 1100 400 50 200
O2 + CF4 O2 75 1100 400 50 200
CF4 75

O2 Plasma Resistance Test_ Nano Filler FFKM

O2 Plasma Resistance Test_ Nano Filler FFKM

O2 Plasma Resistance Test Result_ 일반 FFKM

O2 Plasma Resistance Test Result_ 일반 FFKM

O2+CF4 Plasma Resistance Test Result_ Nano Filler FFKM

O2+CF4 Plasma Resistance Test Result_ Nano Filler FFKM

O2+CF4 Plasma Resistance Test Result_ 일반 FFKM

O2+CF4 Plasma Resistance Test Result_ 일반 FFKM
   
   

Compression transformation ration

영구압축변형률1영구압축변형률2


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