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NANOPURE

Physical Properties

FFKM은 과불화 탄성체로 일반 불소고무보다 더 많은 양의 불소를 포함하고 있는 불소고무를 말합니다.
FFKM은 더 높은 온도와 다양한 화학물질들에 저항성을 가지고 있으며 플라즈마가 존재하는 환경에서도 오랜 시간 동안 견딜 수 있습니다. 특히 특정 등급의 과불소고무는 최대 327℃에서 연속 사용할 수 있어 이러한 특징을 바탕으로 반도체, 석유화학 등 Sealing이 필요한 다양한 산업에서 활용되고 있습니다.

01 Molecular Structure

분자 구조

FFKM & FKM Physical Properties

02 MNE Products

MNE
Products

03Applications

적용분야

Automotive

Semiconductor

Oil & Gas

Chemical Processing
Industry

상세 비교

Contents	공정	Seal 온도	DuPont^TM / Kalrez®	GreeneTweed^TM / Chemraz®	MNE^TM NANOPURE®
Plasma Processes	HDP-CVD / PE-CVD	25 ~ 200℃	9100 / 8085	XRZ 657	HX-8 XUP M208
	Etching	25 ~ 200℃			HX-8 XUP M208
	Ashing / Stripping	25 ~ 250℃			HP9600 XUP HX-10
Thermal Processes	SA - CVD	25 ~ 250℃	8085	XE38	I800W HP9600
	Metal-CVD, ALD, LP-CVD	25 ~ 300℃	8900 / 9100	657	HX-5 HX-8
	Oxidation, Diffusion	150 ~ 300℃	9800 / 8475	657	HX-5 875HT
	Lamp Anneal, RTP	150 ~ 300℃	8475	E38	I800W
Wet Processes	Wafer Prep	25 ~ 125℃	6375 4079		I800W 4080
	Etching	25~180℃
	Photolithography	25~125℃
	Stripping	25~125℃	6375
	Copper Plationg	25~100℃	6375

Contents		Service Temp.,℃	Hardness, Shore A	Tensile Stength, MPa	Elongation, %	100% Modulus, MPa	C/S 204℃ at 70hr (177℃ at 22hr), %
Non Filler	HX-10	275	69	19.5	184	3.1	16
	HX-8	310	74	11.0	250	3.9	16
	XUP	300	75	14.0	216	4.2	12
	M208	310	71	11.9	208	4.5	15
With Filler	HX-9	327	78	14.3	178	7.2	10
	HX-7	325	75	11.2	202	6.1	12
	875HT	320	75	10.0	220	4.2	12
	4080	280	78	17.7	140	11.4	20
Copolymer	7575	220	75	15.1	210	5.3	28
Copolymer	7870G	220	75	14.0	220	6.2	28
Terpolymer	EAO75S	260	74	21.6	230	5.4	16
Terpolymer	9020SP	260	70	18.2	290	2.1	20
HPE (Tetrapolymer)	9023SP	250	73	22.5	226	4.7	17.9
	UTC-3	250	68	20.0	280	2.6	20
	UTC-4	220	68	17.1	323	2.2	23
PVMQ	102FVMQ	200	70	10.0	300	4.0	15

FFKM – non Filler
FFKM – with Filler
FKM – Copolymer
FKM – Terpolymer
HPE – Tetrapolymer
FVMQ

NANOPURE® HX-10

For Semiconductor Ash/Strip Application

NANOPURE® HX-10은 Ash/Strip 공정을 위한 투명한 제품입니다.

NANOPURE® HX-10은 충전제없이 설계된 초순수 과불화탄성체 제품으로 공정오염에 대한 위험을 최소화하며, 산소 및 불소 기반 플라즈마 환경에서 우수한 플라즈마 균열 저항성을 나타냅니다. 또한, 뛰어난 기계적 강도 및 낮은 영구압축 복원율을 가지고 있습니다. NANOPURE® HX-10은 최대 275℃에서 사용 가능합니다.

Features & Benefit

Exceptional plasma resistance in oxygen and fluorine environments
High purity, very low metallic ion content
Excellent compression set properties
Excellent resistance to dry process chemistry

Suggested Applications

Gas inlet / outlet seals
Endpoint windows
Other static and low stress / low sealing force application

Typical Physical Properties

Color	Transparent Amber
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	69
Tensile Strength at Break²⁾, Mpa	19.5
Elongation at Break³⁾, %	184
100% Modulus⁴⁾, Mpa	3.1
Compression Set⁵⁾, %	-
70 hours @ 204℃	16
Maximum Application Temperature, ℃	275

1) ASTM D1415 (ISO 48), 2) ASTM D412 (ISO 37), 3) ASTM D412 (ISO 37), 4) ASTM D412 (ISO 37), 5) ASTM D395 Method B : (ISO 815)

Color	Dark Auburn
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	74
Tensile Strength at Break²⁾, Mpa	11.0
Elongation at Break³⁾, %	250
100% Modulus⁴⁾, Mpa	3.9
Compression Set⁵⁾, %	-
70 hours @ 204℃	16
70 hours @ 250℃	20
70 hours @ 300℃	39
70 hours @ 310℃	43
Maximum Application Temperature, ℃	310

Color	Dark Auburn
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	14.0
Elongation at Break³⁾, %	216
100% Modulus⁴⁾, Mpa	4.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	12
70 hours @ 300℃	38
Maximum Application Temperature, ℃	300

Color	Dark Auburn
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	71
Tensile Strength at Break²⁾, Mpa	11.9
Elongation at Break³⁾, %	208
100% Modulus⁴⁾, Mpa	4.5
Compression Set⁵⁾, %	-
70 hours @ 204℃	15
70 hours @ 250℃	19
70 hours @ 300℃	41
70 hours @ 310℃	44
Maximum Application Temperature, ℃	310

Color	Black
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	78
Tensile Strength at Break²⁾, Mpa	14.3
Elongation at Break³⁾, %	178
100% Modulus⁴⁾, Mpa	7.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	10
70 hours @ 250℃	14
70 hours @ 300℃	18
70 hours @ 325℃	32
Maximum Application Temperature, ℃	327

Color	Gray
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	11.2
Elongation at Break³⁾, %	202
100% Modulus⁴⁾, Mpa	6.1
Compression Set⁵⁾, %	-
70 hours @ 204℃	12
70 hours @ 300℃	34
70 hours @ 310℃	52
Maximum Application Temperature, ℃	325

Color	Beige
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	10.0
Elongation at Break³⁾, %	220
100% Modulus⁴⁾, Mpa	4.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	12
70 hours @ 300℃	38.9
Maximum Application Temperature, ℃	320

Color	White
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	78
Tensile Strength at Break²⁾, Mpa	17.7
Elongation at Break³⁾, %	140
100% Modulus⁴⁾, Mpa	11.4
Compression Set⁵⁾, %	-
70 hours @ 204℃	20
70 hours @ 300℃	32
Maximum Application Temperature, ℃	280

Color	Black
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	15.1
Elongation at Break³⁾, %	210
100% Modulus⁴⁾, Mpa	5.3
Compression Set⁵⁾, %	-
70 hours @ 204℃	28
Maximum Continuous Service, Temperature, ℃	220

Color	Green
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	14.0
Elongation at Break³⁾, %	220
100% Modulus⁴⁾, Mpa	6.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	28
Maximum Continuous Service, Temperature, ℃	220

Color	Black
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	74
Tensile Strength at Break²⁾, Mpa	21.6
Elongation at Break³⁾, %	230
100% Modulus⁴⁾, Mpa	5.4
Compression Set⁵⁾, %	-
70 hours @ 204℃	16
Maximum Continuous Service, Temperature, ℃	260

Color	White
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	70
Tensile Strength at Break²⁾, Mpa	18.2
Elongation at Break³⁾, %	290
100% Modulus⁴⁾, Mpa	2.1
Compression Set⁵⁾, %	-
70 hours @ 204℃	20
Maximum Continuous Service, Temperature, ℃	260

Color	Light Gray
Polymer Type	Tetrapolymer(HPE)
Hardness¹⁾, Shore A	73
Tensile Strength at Break²⁾, Mpa	22.5
Elongation at Break³⁾, %	226
100% Modulus⁴⁾, Mpa	4.7
Compression Set⁵⁾, %	-
70 hours @ 204℃	17.9
Maximum Continuous Service, Temperature, ℃	250

Color	Translucent Brown
Polymer Type	High performance elastomer
Hardness¹⁾, Shore A	68
Tensile Strength at Break²⁾, Mpa	20.0
Elongation at Break³⁾, %	280
100% Modulus⁴⁾, Mpa	2.6
Compression Set⁵⁾, %	-
70 hours @ 204℃	20
70 hours @ 250℃	37
Maximum Continuous Service, Temperature, ℃	250

Color	Translucent Brown
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	68
Tensile Strength at Break²⁾, Mpa	17.1
Elongation at Break³⁾, %	323
100% Modulus⁴⁾, Mpa	2.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	23
Maximum Continuous Service, Temperature, ℃	220

Color	Sky Blue
Polymer Type	FVMQ
Hardness¹⁾, Shore A	70
Tensile Strength at Break²⁾, Mpa	10.0
Elongation at Break³⁾, %	300
100% Modulus⁴⁾, Mpa	4.0
Compression Set⁵⁾, %	-
22 hours @ 177℃	15
Service Temperature, ℃	- 60 ~ 200

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