product

NANOPURE
  • Home

  • product

    Physical Properties

    FFKM is a perfluoroelastomer that contains more fluorine than general fluoroelastomer.
    FFKM is resistant to higher temperatures and various chemicals and can withstand long periods of time even in the presence of plasma. In particular, perfluoroelastomers of a specific grade can be used continuously at up to 327℃, and based on these characteristics, they are used in various industries that require sealing, such as semiconductors and petrochemicals.

    01 Molecular Structure

    Molecular Structure

    FFKM & FKM Physical Properties

    FFKM & FKM Physical Properties

    02 MNE Products

    MNE
    Products

    03Applications

    Field of Application

    Automotive

    Semiconductor

    Oil & Gas

    Chemical Processing
    Industry

    Detailed Comparison

    Contents Process Seal Temperature DuPontTM / Kalrez® GreeneTweedTM / Chemraz® MNETM NANOPURE®
    Plasma Processes HDP-CVD / PE-CVD 25 ~ 200℃ 9100 / 8085 XRZ 657 HX-8 XUP M208
    Etching 25 ~ 200℃
    Ashing / Stripping 25 ~ 250℃ HP9600 XUP HX-10
    Thermal Processes SA - CVD 25 ~ 250℃ 8085 XE38 I800W HP9600
    Metal-CVD, ALD, LP-CVD 25 ~ 300℃ 8900 / 9100 657 HX-5 HX-8
    Oxidation, Diffusion 150 ~ 300℃ 9800 / 8475 657 HX-5 875HT
    Lamp Anneal, RTP 150 ~ 300℃ 8475 E38 I800W
    Wet Processes Wafer Prep 25 ~ 125℃ 6375
    4079
      I800W 4080
    Etching 25~180℃
    Photolithography 25~125℃
    Stripping 25~125℃ 6375
    Copper Plationg 25~100℃
    Contents Color Service
    Temp.,℃
    Hardness,
    Shore A
    Tensile
    Stength, MPa
    Elongation, % 100%
    Modulus, MPa
    C/S 204℃ at 70hr
    (177℃ at 22hr), %
    Non Filler HX-10 275 69 19.5 184 3.1 16
    HX-8 310 74 11.0 250 3.9 16
    XUP 300 75 14.0 216 4.2 12
    M208 310 71 11.9 208 4.5 15
    With Filler HX-9 327 78 14.3 178 7.2 10
    HX-7 325 75 11.2 202 6.1 12
    875HT 320 75 10.0 220 4.2 12
    4080 280 78 17.7 140 11.4 20
    Copolymer 7575 220 75 15.1 210 5.3 28
    7870G 220 75 14.0 220 6.2 28
    Terpolymer EAO75S 260 74 21.6 230 5.4 16
    9020SP 260 70 18.2 290 2.1 20
    HPE
    (Tetrapolymer)
    9023SP 250 73 22.5 226 4.7 17.9
    UTC-3 250 68 20.0 280 2.6 20
    UTC-4 220 68 17.1 323 2.2 23
    Pvmq 102FVMQ 200 70 10.0 300 4.0 15
    • FFKM – non Filler
    • FFKM – with Filler
    • FKM – Copolymer
    • FKM – Terpolymer
    • HPE – Tetrapolymer
    • FVMQ

    NANOPURE® 7870G

    Versatile High Performance Fluoroelastomer

    NANOPURE ® 7870G is a green general-purpose FKM product.

    NANOPURE ® 7870G offers excellent chemical resistance and is resistant to many types of chemicals. In addition, it is suitable for both static and dynamic processes due to its excellent mechanical properties and permanent compression recovery rate. NANOPURE ® 7870G can be used up to 220℃.

    Features & Benefit

    • Outstanding physical properties
    • Low out-gassing
    • Good chemical resistance

    Suggested Applications

    • Chamber seals
    • Window seals
    • Gas inlet seals
    • Gaskets
    • Door seals
    • Lid seals
    • KF fitting seals
    • Fitting and union seals
    • Fitting and union seals

    Typical Physical Properties

    Color Green
    Polymer Type Fluoroelastomer
    Hardness1), Shore A 75
    Tensile Strength at Break2), Mpa 14.0
    Elongation at Break3), % 220
    100% Modulus4), Mpa 6.2
    Compression Set5), % -
    70 hours @ 204℃ 28
    Maximum Continuous Service, Temperature, ℃ 220

    1) ASTM D1415 (ISO 48), 2) ASTM D412 (ISO 37), 3) ASTM D412 (ISO 37), 4) ASTM D412 (ISO 37), 5) ASTM D395 Method B : (ISO 815)